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Rapid Thermal Processing of Semiconductors

Rapid Thermal Processing of Semiconductors

Hardcover

Series: Microdevices

Technology & Engineering

ISBN10: 0306450542
ISBN13: 9780306450549
Publisher: Springer
Published: May 31 1997
Pages: 358
Weight: 1.92
Height: 1.01 Width: 6.80 Depth: 10.20
Language: English
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

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Borisenko, Victor E.

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Technology & Engineering