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Rapid Thermal Processing of Semiconductors

Rapid Thermal Processing of Semiconductors

Paperback

Series: Microdevices

Technology & EngineeringPhysics

ISBN10: 148991806X
ISBN13: 9781489918062
Publisher: Springer
Published: Jun 20 2013
Pages: 358
Weight: 1.18
Height: 0.79 Width: 6.14 Depth: 9.21
Language: English
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

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Borisenko, Victor E.

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Technology & Engineering