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Plasma Processing of Semiconductors
Hardcover
Series: NATO Science Series E:, Book 336
ISBN13: 9780792345671
Publisher: Springer Nature
Published: May 31 1997
Pages: 613
Weight: 2.38
Height: 1.50 Width: 6.20 Depth: 9.44
Language: English
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
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