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Plasma Processing of Semiconductors
Paperback
Series: NATO Science Series E:, Book 336
ISBN13: 9789401064866
Publisher: Springer Nature
Published: Oct 12 2012
Pages: 613
Weight: 1.91
Height: 1.27 Width: 6.14 Depth: 9.21
Language: English
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
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