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Micro-Fluidic and Micro-electromechanical System Applications: Subtractive Processing of Glass Substrates

Micro-Fluidic and Micro-electromechanical System Applications: Subtractive Processing of Glass Substrates

Hardcover

Technology & Engineering

ISBN10: 103274779X
ISBN13: 9781032747798
Publisher: CRC Press
Published: Mar 19 2026
Pages: 286
Weight: 1.31
Height: 0.69 Width: 6.14 Depth: 9.21
Language: English

The text focuses on covering advanced manufacturing processes to fabricate microfluidic and micro-electromechanical system devices.

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Van Toan, Nguyen

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Technology & Engineering