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Capacitive Silicon Resonators: Performance Enhancement Methods
Hardcover
ISBN13: 9780367217761
Publisher: CRC Press
Published: Jun 24 2019
Pages: 162
Weight: 0.90
Height: 0.60 Width: 6.10 Depth: 9.40
Language: English
Recent progress in performance enhancement methods for capacitive silicon resonator will be outlined in this work. Several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, will be discussed.
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