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Handbook of Advanced Plasma Processing Techniques

Handbook of Advanced Plasma Processing Techniques

Paperback

Technology & EngineeringPhysics

ISBN10: 3642630960
ISBN13: 9783642630965
Publisher: Springer Nature
Published: Nov 1 2012
Pages: 655
Weight: 2.04
Height: 1.35 Width: 6.14 Depth: 9.21
Language: English
The ability to make small features in Si, metals, dielectrics and other materials is what has enabled rapid advances in computing, communications, aeronautics and all other technologies that depend on microelectronics, miniature sensors and actuators and magnetic data storage. Plasma techniques enable the fine control and accurate pattern transfer and thus are central to our technology age.

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