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Handbook of Advanced Plasma Processing Techniques

Handbook of Advanced Plasma Processing Techniques

Hardcover

Technology & EngineeringPhysics

ISBN10: 3540667725
ISBN13: 9783540667728
Publisher: Springer Nature
Published: Aug 28 2000
Pages: 655
Weight: 2.32
Height: 1.23 Width: 6.50 Depth: 9.40
Language: English
The ability to make small features in Si, metals, dielectrics and other materials is what has enabled rapid advances in computing, communications, aeronautics and all other technologies that depend on microelectronics, miniature sensors and actuators and magnetic data storage. Plasma techniques enable the fine control and accurate pattern transfer and thus are central to our technology age.

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