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Fundamental Aspects of Silicon Oxidation

Fundamental Aspects of Silicon Oxidation

Paperback

Series: Springer Materials Science, Book 46

Technology & Engineering

ISBN10: 3642625835
ISBN13: 9783642625831
Publisher: Springer Nature
Published: Oct 5 2012
Pages: 262
Weight: 0.87
Height: 0.59 Width: 6.14 Depth: 9.21
Language: English
This book deals with an important basic technology in microelectronics. It discusses silicon oxidation in a tutorial fashion from both experimental and theoretical viewpoints. The authors report on the state of the art both at Lucent Technology and in academic research. The book will appeal to researchers and advanced students.

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