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Fundamental Aspects of Silicon Oxidation

Fundamental Aspects of Silicon Oxidation

Hardcover

Series: Springer Materials Science, Book 46

Medical ReferenceTechnology & Engineering

ISBN10: 354041682X
ISBN13: 9783540416821
Publisher: Springer Nature
Published: Apr 24 2001
Pages: 262
Weight: 1.25
Height: 0.69 Width: 6.14 Depth: 9.21
Language: English
This book deals with an important basic technology in microelectronics. It discusses silicon oxidation in a tutorial fashion from both experimental and theoretical viewpoints. The authors report on the state of the art both at Lucent Technology and in academic research. The book will appeal to researchers and advanced students.

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