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CMOS Plasma and Process Damage
Hardcover
Technology & EngineeringGeneral ComputersPhysics
ISBN13: 9783031890284
Publisher: Springer
Published: May 17 2025
Pages: 466
Weight: 1.89
Height: 1.06 Width: 6.14 Depth: 9.21
Language: English
This book discusses the complex technology of building CMOS computer chips and covers some of the unusual problems that can occur during chip manufacturing. Readers will learn how plasma and process damage results from the high-energy processes that are used in chip manufacturing, causing harm to the chips, functional failure and reliability problems.
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