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Wafer Fabrication: Automatic Material Handling System
Hardcover
ISBN13: 9783110486902
Publisher: De Gruyter
Published: Sep 24 2018
Pages: 284
Weight: 1.44
Height: 0.69 Width: 6.69 Depth: 9.61
Language: English
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
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