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Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing

Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing

Paperback

Technology & Engineering

ISBN10: 3642082726
ISBN13: 9783642082726
Publisher: Springer Nature
Published: Dec 7 2010
Pages: 616
Weight: 2.06
Height: 1.43 Width: 6.00 Depth: 9.00
Language: English
This book summarizes the knowledge and experience of the successful Japanese semiconductor companies. For the first time the secrets of processing of semiconductor surfaces for device production are disclosed. All the people and companies involved in manufacturing of silicon-based semiconductor devices should have this book.

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