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ULSI Front-End Technology
Hardcover
ISBN13: 9789813222151
Publisher: World Scientific Publishing Company
Published: Oct 29 2017
Pages: 248
Weight: 1.10
Height: 0.80 Width: 6.00 Depth: 9.10
Language: English
The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.
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