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Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments
Paperback
Technology & EngineeringGeneral MathematicsPhysics
ISBN13: 9783658192372
Publisher: Springer Vieweg
Published: Sep 22 2017
Pages: 316
Weight: 0.92
Height: 0.72 Width: 5.83 Depth: 8.27
Language: English
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
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