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Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures
Paperback
Technology & EngineeringChemistry
ISBN13: 9783642060489
Publisher: Springer Nature
Published: Oct 13 2010
Pages: 222
Weight: 0.74
Height: 0.50 Width: 6.14 Depth: 9.21
Language: English
1 different editions
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Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures
Frühauf, Joachim
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