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Radiation Imaging Detectors Using Soi Technology

Radiation Imaging Detectors Using Soi Technology

Paperback

Series: Synthesis Lectures on Emerging Engineering Technologies

Technology & EngineeringGeneral Computers

ISBN10: 3031009053
ISBN13: 9783031009051
Publisher: Springer Nature
Published: Feb 15 2017
Pages: 59
Weight: 0.31
Height: 0.15 Width: 7.50 Depth: 9.25
Language: English

Silicon-on-Insulator (SOI) technology is widely used in high-performance and low-power semiconductor devices. The SOI wafers have two layers of active silicon (Si), and normally the bottom Si layer is a mere physical structure. The idea of making intelligent pixel detectors by using the bottom Si layer as sensors for X-ray, infrared light, high-energy particles, neutrons, etc. emerged from very early days of the SOI technology. However, there have been several difficult issues with fabricating such detectors and they have not become very popular until recently.

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