Open Daily: 10am - 10pm | Alley door pickup 10am - 7pm 3038 Hennepin Ave Minneapolis, MN
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  • Open Daily: 10am - 10pm
    Alley-side Pickup: 10am - 7pm

    3038 Hennepin Ave Minneapolis, MN
    612-822-4611

Open Daily: 10am - 10pm | Alley-side Pickup: 10am - 7pm
3038 Hennepin Ave Minneapolis, MN
612-822-4611
Run-To-Run Control in Semiconductor Manufacturing

Run-To-Run Control in Semiconductor Manufacturing

Moyne, James
Hurwitz, Arnon M.
Del Castillo, Enrique

Hardcover

Technology & Engineering

ISBN10: 0849311780
ISBN13: 9780849311789
Publisher: CRC Press
Published: Nov 30 2000
Pages: 366
Weight: 1.36
Height: 0.88 Width: 6.35 Depth: 9.52
Language: English
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine runs, thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

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