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Principles of Microelectromechanical Systems

Principles of Microelectromechanical Systems

Hardcover

Series: IEEE Press

Technology & Engineering

ISBN10: 0470466340
ISBN13: 9780470466346
Publisher: Wiley-IEEE Press
Published: Feb 2 2011
Pages: 680
Weight: 2.55
Height: 1.70 Width: 6.30 Depth: 9.30
Language: English
This is the only book of its kind to focus on closed form solutions to micro-mechanical problems. This approach allows readers to easily understand the linear and nonlinear behavior of Micro Electro Mechanical Systems (MEMS) and their design applications. This approach will appeal especially to RF/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The book is also of interest to researchers in MEMS, graduate students in electrical and mechanical engineering, and specialists in electronics design and solid-state fabrication.

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Technology & Engineering