Open Daily: 10am - 10pm | Alley door pickup 10am - 7pm 3038 Hennepin Ave Minneapolis, MN
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  • Open Daily: 10am - 10pm
    Alley-side Pickup: 10am - 7pm

    3038 Hennepin Ave Minneapolis, MN
    612-822-4611

Open Daily: 10am - 10pm | Alley-side Pickup: 10am - 7pm
3038 Hennepin Ave Minneapolis, MN
612-822-4611
Plasma-Surface Interactions and Processing of Materials

Plasma-Surface Interactions and Processing of Materials

Gras-Martí, Alberto
Valles-Abarca, Jose Antonio
Auciello, O.

Hardcover

Series: NATO Science Series E:, Book 176

Technology & EngineeringChemistry

ISBN10: 0792305841
ISBN13: 9780792305842
Publisher: Springer Nature
Published: Jan 31 1990
Pages: 558
Weight: 2.15
Height: 1.25 Width: 6.14 Depth: 9.21
Language: English
An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space.
The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials.
The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.

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