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Plasma Etching: Fundamentals and Applications
Hardcover
Series: Semiconductor Science and Technology, Book 7
Technology & EngineeringPhysics
ISBN13: 9780198562870
Publisher: OUP Oxford
Published: Jul 30 1998
Pages: 356
Weight: 1.50
Height: 0.81 Width: 6.14 Depth: 9.21
Language: English
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