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Physical and Technical Problems of Soi Structures and Devices

Physical and Technical Problems of Soi Structures and Devices

Paperback

Series: NATO Science Partnership Subseries: 3, Book 4

Technology & Engineering

ISBN10: 9401040524
ISBN13: 9789401040525
Publisher: Springer Nature
Published: Oct 21 2012
Pages: 290
Weight: 0.94
Height: 0.64 Width: 6.14 Depth: 9.21
Language: English
In Physical and Technical Problems of SOI Structures and Devices, specialists in silicon-on-insulator technology from both East and West meet for the first time, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterisation, device and circuit issues.

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