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Optical Inspection of Microsystems

Optical Inspection of Microsystems

Paperback

Series: Optical Science and Engineering, Book 0

Technology & Engineering

ISBN10: 0367390574
ISBN13: 9780367390570
Publisher: Crc Pr Inc
Published: Oct 17 2019
Pages: 532
Weight: 2.80
Height: 1.30 Width: 7.00 Depth: 9.90
Language: English
This book offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents state-of-the-art methods of optical analysis and enumerates their basic components.

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Technology & Engineering