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Nanolithography: A Borderland Between Stm, Eb, Ib, and X-Ray Lithographies
Paperback
Series: NATO Science Series E:, Book 264
ISBN13: 9789048143887
Publisher: Springer Nature
Published: Dec 5 2010
Pages: 216
Weight: 0.72
Height: 0.48 Width: 6.14 Depth: 9.21
Language: English
Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).
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