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Nanoimprint Lithography: An Enabling Process for Nanofabrication

Nanoimprint Lithography: An Enabling Process for Nanofabrication

Paperback

Technology & Engineering

ISBN10: 3662510863
ISBN13: 9783662510865
Publisher: Springer Nature
Published: Aug 23 2016
Pages: 249
Weight: 0.85
Height: 0.57 Width: 6.14 Depth: 9.21
Language: English
Principles and statues of nanoimprint lithography.- Stamp Fabrication.- stamp surface treatment.- Nanoimprint lithography resists.- Nanoimprint lithography process.- Modeling and Simulation of NIL.- Application of NIL in Light emitting Diodes.- Application of NIL in memory devices.- Application of NIL in solar cell.

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