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Nanofabrication: Principles, Capabilities and Limits
Paperback
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ISBN13: 9783319818757
Publisher: Springer
Published: Jun 20 2018
Pages: 432
Weight: 1.38
Height: 0.91 Width: 6.10 Depth: 9.25
Language: English
1. Introduction.- 2. Nanofabrication by Photons.- 3. Nanofabrication by Electron Beam.- 4. Nanofabrication by Ion Beam.- 5. Nanofabrication by Scanning Probes.- 6. Nanofabrication by Replication.- 7. Nanoscale Pattern Transfer by Etching.- 8. Nanoscale Pattern Transfer by Deposition.- 9. Indirect Nanofabrication.- 10. Nanofabrication by Self-Assembly.- 11. Applications of Nanofabrication Technologies.
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