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Nano-Tribology and Materials in Mems
Hardcover
ISBN13: 9783642369346
Publisher: Springer
Published: Sep 11 2013
Pages: 275
Weight: 1.20
Height: 0.90 Width: 6.40 Depth: 9.00
Language: English
Formation of arrayed Au nanoparticles on SiO2/Si substrate by use of dewetting phenomenon: An example of bottom-up technologies in MEMS.- Nanofriction by Reciprocating Sliding.- The structure and tribological behaviors of nanostructure thin films.- Detection of lateral forces and formation of atomic chains.- Reducing friction force on silicon surface using submicron- to atomic-scale geometry effects.- Microfabricated sleds for friction studies.- Vapor Phase Lubrication-Nanotribology Fundamentals and MEMS Applications.- A Novel Method of Lubrication of Micro-Electro-Mechanical Systems.- Robust Tribological Solutions for Silicon and Polymer Based MEMS/NEMS.- Lubrication of High Sliding MEMS.- Pre-modifications of Si surface to enhance the wear durability of PFPE nano-lubricant.- Probing the complexities of Friction in submicron contacts between two pristine surfaces.- Atomistic Simulation of Polymer Nanotribology.- Simulation of frictional behavior of polymer-on-polymer sliding.- Fundamentals of friction and wear mechanisms at loads relevant to MEMS applications.
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