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Mems/Moem Packaging: Concepts, Designs, Materials and Processes

Mems/Moem Packaging: Concepts, Designs, Materials and Processes

Hardcover

Series: Nanoscience and Technology

Technology & Engineering

ISBN10: 0071455566
ISBN13: 9780071455565
Publisher: Mcgraw Hill Book Co
Published: Aug 1 2005
Pages: 240
Weight: 1.07
Height: 0.85 Width: 6.32 Depth: 9.12
Language: English
Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product.


While MEMS technology has progressed rapidly, commercialization of MEMS has been hindered by packaging technology barriers and costs. One of the key issues in the industrialization of MEMS, MOEM and ultimately Nanoelectrical devices is the development of appropriate packaging solutions for the protection, assembly, and long term reliable operation. This book rigorously examines the properties of the materials used in MEMS and MOEN assembly then evaluates them in terms of their routing, electrical performance, thermal management and reliability. With this as a starting point, the book moves on to discuss advanced packaging methods such as: molded thermoplastic packages for MEMS, wafer-assembled RFID, and wafer-level stacked packaging.

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Technology & Engineering