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Mems Resonator Filters

Mems Resonator Filters

Hardcover

Series: Materials, Circuits and Devices

Technology & Engineering

ISBN10: 1785618962
ISBN13: 9781785618963
Publisher: Institution Of Engineering & T
Published: Jun 15 2020
Pages: 432
Weight: 1.90
Height: 1.10 Width: 6.40 Depth: 9.50
Language: English

The use of MEMS resonators for signal processing is relatively new and has the potential to change the topology of newer generation circuits. New materials, design and fabrication processes, and integration with conventional circuitry will need to be considered.

This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges are discussed. Materials and their selection, CAD tools for system design and the integration of MEMS with CMOS circuitry, and the design, fabrication, testing and packaging of MEMS filters themselves are addressed in detail.

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Technology & Engineering