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Machine Learning-Based Modelling in Atomic Layer Deposition Processes

Machine Learning-Based Modelling in Atomic Layer Deposition Processes

Hardcover

Series: Emerging Materials and Technologies

Technology & Engineering

ISBN10: 1032386703
ISBN13: 9781032386706
Publisher: CRC Press
Published: Dec 15 2023
Pages: 354
Weight: 1.55
Height: 0.88 Width: 6.14 Depth: 9.21
Language: English

This book describes the application of machine learning modelling approaches in atomic layer deposition and presents detailed information on modelling, optimization, and prediction of the behaviour and characteristics of ALD for improved process quality control.

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Adeleke, Oluwatobi

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Technology & Engineering