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Microsystems Dynamics

Microsystems Dynamics

Paperback

Series: Intelligent Systems, Control and Automation: Science and Eng, Book 44

Technology & Engineering

ISBN10: 9400734107
ISBN13: 9789400734104
Publisher: Springer Nature
Published: Jan 2 2013
Pages: 214
Weight: 0.70
Height: 0.47 Width: 6.14 Depth: 9.21
Language: English

Foreword; Preface; Introduction to Microsystems; Fabrication Technologies of Microsystems; Overview; Nickel Surface Micromachining Technology for Fabrication of Microswitches; UV Lithography for Fabrication of Micromotors; Common MEMS Actuators; Parallel Plate Capacitors; Comb Drives; Electrostatic Micromotors; Electrostatic Microswitches; Theoretical Background of Multiphysical Interactions Common in Microsystems; Introduction to Coupled-Field Modeling; Electrostatic Actuation and Pull-in Instability; Viscous Air Damping; Vibro-Impact Interactions; Experimental Testing of Microsystem Dynamics; Vibration Excitation Methods; Optical Techniques for Measurement of Vibrations of Microstructures; Study of Elastic Vibro-Impact Macrosystems and Microsystems; Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact; Macrosystems;;Analysis of Coupled-Field Dynamics in Contact-Type Electrostatic Microactuator; Numerical Modeling and Analysis of Fluidic-Structural Interaction; Numerical Modeling and Analysis of Electrostatic-Structural Interaction; Numerical Modeling and Analysis of Vibro-Impact Interaction; Numerical Analysis of the Micromotor; Finite Element Modeling of Micromotor; Modal Analysis; Micromotor Control; Analytical Model of a Micromotor; Basics of Micromotor Geometry; Torque Analysis; Micromotor Design Guidelines; References

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