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Micromachines as Tools for Nanotechnology
Hardcover
Series: Microtechnology and Mems
ISBN13: 9783540008569
Publisher: Springer
Published: Jul 11 2003
Pages: 211
Weight: 1.08
Height: 0.56 Width: 6.14 Depth: 9.21
Language: English
This book addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano-objects. The book covers state-of-the-art MEMS and NEMS devices for DNA molecular handling and analysis, cell handling and culture on a chip, chemical lab-on-a-chip, multi-probes for vacuum tunneling microscopy and AFM, and characterization of quantum semiconductor structures. Readers will gain deep insight into such developments and students will learn about the emerging field of MEMS and nanotechnology
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