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Microlithography: Science and Technology

Microlithography: Science and Technology

Hardcover

Technology & Engineering

ISBN10: 1439876754
ISBN13: 9781439876756
Publisher: Crc Pr Inc
Published: May 20 2020
Pages: 838
Weight: 2.95
Height: 1.65 Width: 7.09 Depth: 10.08
Language: English
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.

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Technology & Engineering