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Micro and Nano Fabrication: Tools and Processes
Paperback
ISBN13: 9783662508268
Publisher: Springer
Published: Oct 6 2016
Pages: 519
Weight: 1.67
Height: 1.11 Width: 6.14 Depth: 9.21
Language: English
Introduction-MEMS, a Historical Perspective.- Vacuum Technology.- Deposition Technologies.- Etching Technologies.- Doping and Surface Modification.- Lithography.- LIGA.- Nanofabrication by Self-Assembly.- Enabling Technologies I - Wafer Planarization and Bonding.- Enabling Technologies II - Contamination Control.- Device Fabrication - An Example.
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