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  • Open Daily: 10am - 10pm
    Alley-side Pickup: 10am - 7pm

    3038 Hennepin Ave Minneapolis, MN
    612-822-4611

Open Daily: 10am - 10pm | Alley-side Pickup: 10am - 7pm
3038 Hennepin Ave Minneapolis, MN
612-822-4611
Metal Impurities in Silicon- And Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact

Metal Impurities in Silicon- And Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact

Claeys, Cor
Simoen, Eddy

Hardcover

Series: Springer Materials Science, Book 270

Technology & Engineering

ISBN10: 3319939246
ISBN13: 9783319939247
Publisher: Springer Nature
Published: Aug 22 2018
Pages: 438
Weight: 1.84
Height: 1.06 Width: 6.14 Depth: 9.21
Language: English
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.

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