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3038 Hennepin Ave Minneapolis, MN
612-822-4611
MEMS Pressure Sensors: Fabrication and Process Optimization

MEMS Pressure Sensors: Fabrication and Process Optimization

Hardcover

Technology & Engineering

ISBN10: 8461622073
ISBN13: 9788461622078
Publisher: Concha Books
Published: Dec 23 2012
Pages: 176
Weight: 0.89
Height: 0.44 Width: 6.00 Depth: 9.00
Language: English
MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. This leads to the uniqueness of the book. MEMS Pressure Sensors: Fabrication and Process Optimization will greatly benefit undergraduate and postgraduate students of MEMS and NEMS courses. Process engineers and technologists in the microelectronics industry including MEMS-based sensors manufacturers.

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