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Low Dielectric Constant Materials for IC Applications

Low Dielectric Constant Materials for IC Applications

Hardcover

Series: Springer Advanced Microelectronics, Book 9

Technology & Engineering

ISBN10: 3540678190
ISBN13: 9783540678199
Publisher: Springer
Published: Nov 14 2002
Pages: 310
Weight: 1.31
Height: 0.70 Width: 6.40 Depth: 9.68
Language: English
Low dielectric materials are an important component of microelectronic devices. In this carefully edited volume the leading researchers give an introduction to and a survey of the various fields of dielectrics for IC integration. The book appeals to materials reserachers, electrical engineers and advanced students.

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Ho, Paul S.

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Technology & Engineering