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Lithography

Lithography

Hardcover

Technology & Engineering

ISBN10: 0470471557
ISBN13: 9780470471555
Publisher: John Wiley & Sons
Published: Dec 1 2008
Pages: 704
Weight: 3.43
Height: 1.70 Width: 7.00 Depth: 10.00
Language: English
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

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Technology & Engineering