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Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology
Paperback
Technology & EngineeringChemistry
ISBN13: 9783540539544
Publisher: Springer
Published: May 28 1991
Pages: 159
Weight: 0.62
Height: 0.37 Width: 6.69 Depth: 9.61
Language: English
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