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Low Temperature Epitaxial Growth of Semiconductors

Low Temperature Epitaxial Growth of Semiconductors

Hardcover

Technology & EngineeringPhysics

Currently unavailable to order

ISBN10: 9971508397
ISBN13: 9789971508395
Publisher: World Scientific Pub Co Inc
Published: Dec 1 1990
Pages: 352
Language: English
Low temperature processes for semiconductors have been recently under intensive development to fabricate controlled device structures with minute dimensions in order to achieve the highest device performance and new device functions as well as high integration density. Comprising reviews by experts long involved in the respective pioneering work, this volume makes a useful contribution toward maturing the process of low temperature epitaxy as a whole.

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