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612-822-4611
Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics

Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics

Paperback

Series: Woodhead Publishing Electronic and Optical Materials

Technology & Engineering

ISBN10: 0128202556
ISBN13: 9780128202555
Publisher: Woodhead Publishing
Published: Apr 23 2021
Pages: 426
Weight: 1.25
Height: 0.87 Width: 6.00 Depth: 9.00
Language: English
Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering.

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