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Ionenimplantation
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ISBN10: 3519032066
ISBN13: 9783519032069
Publisher: Springer Nature
Published: Jun 1 1978
Pages: 366
Weight: 1.29
Height: 0.76 Width: 6.69 Depth: 9.61
Language: German
ISBN13: 9783519032069
Publisher: Springer Nature
Published: Jun 1 1978
Pages: 366
Weight: 1.29
Height: 0.76 Width: 6.69 Depth: 9.61
Language: German
In den letzten Jahren erschienen bereits mehrere Bücher zum Thema Ionenimplanta- tion, die sich fast ausschlie lich an auf dem Gebiet der Ionenimplantation tätige Wissenschaftler wenden und deshalb der Theorie einen sehr breiten Raum einräumen. Im Gegensatz hierzu wendet sich das vorliegende Werk weniger an den Implanta- tionsfachmann, sondern mehr an Forscher und Entwickler in Industrie, F or- schungslaboratorien und Hochschulen, die an der Ionenimplantation als neuem Hilfsmittel zur Veränderung von Materialeigenschaften interessiert sind und wissen wollen, ob die Ionenimplantation für ihr Problem anwendbar ist. Bei einer solchen Ausrichtung mu deshalb nach unserer Meinung neben einem kurzen Abri der theoretischen Grundlagen vor allem die Behandlung von Problemen bei der Anwendung der Implantation im Vordergrund der Darstellung stehen, wovon hier zum Beispiel genannt seien die elektrische Aktivierung implantierter Ionen, Diffusionseffekte sowie die Diskussion der hauptsächlich verwendeten Me - methoden zur Untersuchung implantierter Schichten, die apparativen Anforderungen an Beschleunigungssysteme und natürlich zahlreiche Beispiele zur Anwendung der Ionenimplantation. Die Schwerpunkte des Buches liegen bei der Dotierung von Halbleitern durch Ionenimplantation, da dies zur Zeit und wahrscheinlich noch sehr lange ihre Hauptanwendung sein wird; dennoch wird von Fall zu Fall auf die weiteren Möglich- keiten der Implantation eingegangen.
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