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Introduction to Microsystem Design

Introduction to Microsystem Design

Paperback

Series: Rwthedition

Technology & EngineeringGeneral Science

Currently unavailable to order

ISBN10: 3642268528
ISBN13: 9783642268526
Publisher: Springer Nature
Published: Aug 3 2013
Pages: 322
Weight: 1.08
Height: 0.74 Width: 6.15 Depth: 9.19
Language: English
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.

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