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  • Open Daily: 10am - 10pm
    Alley-side Pickup: 10am - 7pm

    3038 Hennepin Ave Minneapolis, MN
    612-822-4611

Open Daily: 10am - 10pm | Alley-side Pickup: 10am - 7pm
3038 Hennepin Ave Minneapolis, MN
612-822-4611
Introduction to MEMS

Introduction to MEMS

Bin Poyen, Faruk

Paperback

Technology & Engineering

ISBN10: 6136283328
ISBN13: 9786136283326
Publisher: LAP Lambert Academic Publishing
Published: Oct 27 2025
Pages: 252
Weight: 0.75
Height: 0.57 Width: 6.00 Depth: 9.00
Language: English
Nestled within our smartphones, automobiles, medical devices, and industrial systems are microscopic machines-Microelectromechanical Systems, or MEMS-that sense, actuate, and control the environment around us. This book, Introduction to MEMS, is designed to be the comprehensive guide on understanding with interdisciplinary technology, providing a structured and thorough foundation in the principles and practices that underpin this dynamic field. This text is structured to logically build knowledge from the ground up, mirroring the development process of a MEMS device itself. We begin by defining the field and its unique characteristics, establishing the what and why of MEMS technology. From there, we delve into the fundamental physics of MEMS mechanics, providing the essential toolkit of stress, strain, and material properties needed to understand device behaviour. The core of the book is dedicated to the intricate world of MEMS fabrication, with dedicated chapters walking through each critical steps: Deposition Techniques, Photolithography, LIGA Etching, Bonding, Micromachining processes, 3D Printing, MEMS polymers and sensors.

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