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High Dielectric Constant Materials: VLSI Mosfet Applications
Hardcover
Series: Springer Advanced Microelectronics, Book 16
ISBN13: 9783540210818
Publisher: Springer
Published: Sep 30 2004
Pages: 710
Weight: 2.64
Height: 1.79 Width: 6.43 Depth: 9.32
Language: English
Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology.
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