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Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems
Hardcover
ISBN13: 9781041144960
Publisher: CRC Press
Published: Dec 19 2025
Pages: 122
Weight: 0.82
Height: 0.38 Width: 6.14 Depth: 9.21
Language: English
Green Etching Techniques for MEMS Applications delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems (MEMS).
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