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Verspannungstechniken zur Leistungssteigerung von CMOS-Transistoren
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ISBN10: 3838126068
ISBN13: 9783838126067
Publisher: S Dwestdeutscher Verlag F R Ho
Published: Jun 10 2011
Pages: 216
Weight: 0.71
Height: 0.49 Width: 6.00 Depth: 9.00
Language: German
ISBN13: 9783838126067
Publisher: S Dwestdeutscher Verlag F R Ho
Published: Jun 10 2011
Pages: 216
Weight: 0.71
Height: 0.49 Width: 6.00 Depth: 9.00
Language: German
Mit dem Erreichen der Grenzen der konventionellen MOSFET-Skalierung werden neue Techniken untersucht, um die Leistungsfähigkeit der CMOS-Technologie dem bisherigen Trend folgend weiter zu steigern. Einer dieser Ansätze ist die Verwendung mechanischer Verspannungen im Transistorkanal. Mechanische Verspannungen führen zu Kristalldeformationen und ändern die elektronische Bandstruktur von Silizium, so dass n- und p-MOSFETs mit verspannten Kanälen erhöhte Ladungsträgerbeweglichkeiten und demzufolge eine gesteigerte Leistungsfähigkeit aufweisen. Die vorliegende Arbeit beschäftigt sich mit den Auswirkungen mechanischer Verspannungen auf die elektronischen Eigenschaften planarer Silicon-On-Insulator-MOSFETs für Höchstleistungsanwendungen sowie mit deren Optimierung und technologischen Begrenzungen. Die unterschiedlichen Konzepte zur Erzeugung der Verspannung werden kurz rekapituliert. Wesentliche Parameter für eine Erhöhung der Verspannung werden mit Hilfe von Experimenten und numerischen Simulationen bestimmt und technologische Herausforderungen bei der Prozessintegration diskutiert.
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