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Protonendotierung Von Silizium: Untersuchung Und Modellierung Protoneninduzierter Dotierungsprofile in Silizium
Paperback
ISBN13: 9783658073893
Publisher: Springer Nature
Published: Oct 21 2014
Pages: 314
Weight: 0.96
Height: 0.75 Width: 5.83 Depth: 8.27
Language: German
Johannes G. Laven beschreibt die Dotierung von kristallinem Silizium mittels Protonenimplantationen mit Energien im Bereich weniger Megaelektronenvolt. Hiermit können Dotierungsprofile in Tiefen zwischen Mikrometern bis weit über 100 m erzeugt und modifiziert werden. Das hierzu notwendige, vergleichsweise niedrige thermische Budget macht derartige Dotierungsprofile insbesondere für die Herstellung aktueller Leistungshalbleiterbauelemente interessant. Der Autor führt die Anforderungen und Grenzen der Protonendotierung aus und zeigt ein analytisches Modell zur Berechnung von Protonen-induzierten Dotierstoffprofilen in Abhängigkeit der Implantationsparameter sowie des thermischen Budgets.
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