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Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices

Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices

Hardcover

Series: NATO Science Partnership Subseries: 3, Book 47

Technology & Engineering

ISBN10: 0792350073
ISBN13: 9780792350071
Publisher: Springer Nature
Published: Mar 31 1998
Pages: 507
Weight: 1.99
Height: 1.13 Width: 6.14 Depth: 9.21
Language: English
An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.

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