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Film Deposition by Plasma Techniques
Paperback
Series: Springer Atomic, Optical, and Plasma Physics, Book 10
Technology & EngineeringPhysics
ISBN13: 9783642845130
Publisher: Springer Nature
Published: Dec 15 2011
Pages: 224
Weight: 0.75
Height: 0.51 Width: 6.14 Depth: 9.21
Language: English
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